Date: May 26-29
Venue: Técnico – Oeiras Campus
More information: Official Website
«The Instituto de Engenharia de Sistemas e Computadores – Microsistemas e Nanotecnologias (INESC-MN), a research unit affiliated with Instituto Superior Técnico, Universidade de Lisboa, will host the 2nd edition of the Dry Etch Experts School, after the big success of the first edition held in April 2024, in Enschede, the Netherlands.
This event strengthens the four main pillars of the EuroNanoLab consortium:
- Enhance excellence by building superior processing competence;
- Accelerate research by process exchange and single-access point to micro- and nanofabrication research infrastructure and expertise;
- Share competencies by defining European standards in cleanroom procedures;
- Strengthening the cooperation by building an alliance between scientists and micro- and nanofabrication experts.
The lectures will be given by internationally recognised academic and industrial experts in the field. The primary objective is to educate and train process engineers on various aspects of dry etching, encompassing fundamental principles, process simulation/modelling, plasma sources, and diverse applications.
The 2nd Dry Etch Experts School provides a platform for experts in dry etching technologies to meet and share ideas, recent achievements and challenges, and discover new advances in equipment hardware and processing technologies related to plasma etching.»
